发明名称 窒化物結晶の製造方法および結晶製造装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for producing a nitride crystal, with which reuse of a reaction vessel is made possible by preventing breakage of the reaction vessel, and with which a high-quality crystal is obtained, in growing the nitride crystal with an ammonothermal method. <P>SOLUTION: After a raw material and an ammonia solvent are filled in the reaction vessel and sealed therein, the reaction vessel is set up in a pressure-tight vessel having a valve, and further after a second solvent is filled in the void between the pressure-tight vessel and the reaction vessel and the pressure-tight vessel is tightly sealed, the nitride crystal is grown in a supercritical and/or a subcritical ammonia atmosphere in the reaction vessel. In this case, the pressure difference between the outside and the inside of the reaction vessel is adjusted so as to be small via the valve. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5747810(B2) 申请公布日期 2015.07.15
申请号 JP20110283116 申请日期 2011.12.26
申请人 发明人
分类号 C30B29/38;C01B21/06;C30B7/10 主分类号 C30B29/38
代理机构 代理人
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