发明名称 CHEMICAL SUPPLYING APPARATUS FOR SPINNER PROCESS
摘要 <p>The present invention relates to a chemical supplying apparatus for a spinner process of an indirect pressurizing mode capable of supplying a chemical to the spinner process through a chemical moving line which is dipped in the chemical by pressurizing the surface of the chemical which is filled in a chemical bottle with pressurized gas. The chemical supplying apparatus comprises: a lower member including a chemical bottle position area to position a chemical bottle; an upper member wherein a line hole for a chemical moving line and a pressurized gas providing line is formed as a container of an overturned shape wherein an opening capable of covering an area including the chemical bottle position area is formed downward; and an elevating device capable of moving the upper member for the lower member upward and downward. If the upper member descends to the top of the lower member after positioning the chemical bottle in the chemical bottle position area in use, the chemical moving line which is formed inside the upper member to the lower side is inserted into a neighboring floor through the opening of the chemical bottle. At the same time, the opening of the upper member is sealed by the upper side of the lower member. Thus, a risk in which an operator inhales chemical steam or the chemical is leaked in replacement and supplement processes can be minimized.</p>
申请公布号 KR101535870(B1) 申请公布日期 2015.07.14
申请号 KR20140051231 申请日期 2014.04.29
申请人 CARRYTECH CO., LTD.;LEE, SANG MOON 发明人 LEE, SANG MOON
分类号 H01L21/08;H01L21/02;H01L21/027 主分类号 H01L21/08
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