GOING UP AND DOWN APPARATUS FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

The present invention relates to a lifting device for a substrate transfer apparatus and a substrate transfer apparatus comprising the same. The lifting device comprises: a lifting frame where a transfer arm supporting a substrate is coupled to be lifted; a driving unit coupled to the lifting frame to provide a driving force to lift the transfer arm; a cover preventing foreign substances generated from the driving unit since the transfer arm is lifted from being scattered; and a cover support unit protruding from the lifting frame to support the cover. The cover support unit and the lifting frame are integrally formed. According to the present invention, movement of the foreign substances scattered from the driving unit is blocked in order to prevent the substrate and the surroundings from being polluted so as to prevent degradation of the quality of the substrate.