ELECTROCHEMICAL INSTALLATION TO SHAPE NANOSIZED COATING

摘要

FIELD: electricity.SUBSTANCE: invention is related to electrochemical installation intended to shape nanosized coating and may be used in semiconductor and electronics industry. The installation contains a computer, a controller and manipulator 1 mounted at the rack 2 rotatable around vertical axis and equipped with holder 3 for a processed sample 4. Around the manipulator 1 rack there are electrochemical cells 5 with electrodes connected to one pole of current source. The sample 4 submerged to electrochemical cells is connected to the other pole of current source. Holder 3 is installed so that it can be moved in regard to manipulator 1, and at that sample 4 in downwardmost position of holder 3 is placed in one of electrochemical cells. One of electrochemical cells is made as measuring cell 7 to control parameters of the processed sample 4. The installation is equipped with tube-type furnace 8 intended for thermal processing of the sample.EFFECT: potential determining and setting of the required parameters for obtained nanomaterial against absolute value and conditions of their change.4 dwg