| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an appearance inspection device that suppresses irregularity of an illumination environment with respect to an inspection surface of an electronic component, and performs an appearance inspection.SOLUTION: In an appearance inspection device 10 configured to: illuminate an inspection face, which is side faces 11, 11a, 12 and 12a of an electronic component 13, with illumination means 31, 31a, 32 and 32a; photograph the inspection face with imaging means 14 and 14a; and perform an appearance inspection, the illumination means 31, 31a, 32 and 32a include beam splitters 33, 33a, 34 and 34a that; are arranged to face the inspection face; is arranged between the inspection face and illumination means 14 and 14a; transmit a part of light irradiated by the illumination means 31, 31a, 32 and 32a; direct the light to the inspection face, reflect a part of the light reflected upon the inspection face; and place an appearance of the inspection face into images of the imaging means 14 and 14a. The light irradiated by the illumination means 31, 31a, 32 is diffused to be incident upon the beam splitters 33, 33a, 34 and 34a.</p> |
