| 摘要 |
<p>Disclosed is a heat conduction type barometric sensor (utilizing thermal excitation) for the measurement of a high bandwidth barometric pressure with high sensitivity and high accuracy that has simple structure and circuit configuration and can measure a barometric pressure in the range of a very low barometric pressure to 1 atm or higher using one sensor chip. The heat conduction type barometric sensor comprises a cantilever-shaped thin film 10 provided with a thin-film temperature sensor, a heating means, and an excitation means. The excitation means utilizes warpage and bending based on a difference in thermal expansion between two main layers constituting the thin film during intermittent heating by a thin-film heater as the heating means, and the two main layers are a silicon layer and a thermally oxidized film of silicon which are significantly different from each other In the coefficient of thermal expansion. A circuit in which the sensitivity is enhanced by the integration of a seebeck current for a predetermined period of time, and a cap which can suppress the influence of an air stream can be also provided.</p> |
