发明名称 |
RESIST STRIPPER COMPOSITION AND METHOD OF STRIPPING RESIST USING THE SAME |
摘要 |
The present invention relates to a resist stripper composition and a method for stripping a resist using the same, and more specifically, to a resist stripper composition which has excellent removal abilities for pattern and etch residue and corrosion resistance to metal wiring by including compounds represented by chemical formula 1, thereby being used for processes for manufacturing a flat panel display device in which a fine pattern is applied to implement high resolution, and an image display device in which the metal wiring is used, and to a method for stripping a resist using the same. |
申请公布号 |
KR20150077929(A) |
申请公布日期 |
2015.07.08 |
申请号 |
KR20130166890 |
申请日期 |
2013.12.30 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
JIN, YOUNG JUN;MYUNG, JUNG JAE |
分类号 |
G03F7/42;G03F7/32;H01L21/027 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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