Crucible for holding a material to be evaporated using a CVD or PVD method

摘要

The crucible has housing element (2) that is mounted on a base plate (1) and formed with an internal hollow structure. A sealing element (3) is provided between front end of the housing element and base plate. The holding devices (4,5) are arranged in opposite end faces of the housing element to exert a compressive force on the base plate.