发明名称 PROCESS FOR PRODUCING A DIELECTRIC ELASTOMER STACK ACTUATOR
摘要 A process for producing a multilayer dielectric elastomer stack actuator, consisting of a plurality of dielectric layers of at least one elastomer embedded between a plurality of electrode layers, comprises the steps of i) application of a liquid, non-crosslinked elastomer to form the dielectric layer (40) with a reproducible layer thickness of less than 50 mum by means of a scanning apparatus (2) on a substrate, directly subsequent thereto ii) application of electrically conductive material particles to the surface of the dielectric layer to form an electrode layer (41, 42) by utilizing the surface tension of the elastomer, and the final steps iii) at least partial crosslinking of the dielectric layer with an electrode layer lying on the surface in a floating manner by thermal treatment and/or irradiation, and repetition of steps i) to iii), wherein all steps proceed under ambient conditions and with an inactive substrate holder (1) and substrate held immovably.
申请公布号 EP2891194(A1) 申请公布日期 2015.07.08
申请号 EP20130748064 申请日期 2013.08.13
申请人 EMPA EIDGENÖSSISCHE MATERIALPRÜFUNGS- UND FORSCHUNGSANSTALT 发明人 KOVACS, GABOR
分类号 H01L41/27;H01L41/45 主分类号 H01L41/27
代理机构 代理人
主权项
地址