Integrated avalanche photodiode arrays

摘要

The present disclosure includes devices for detecting photons, including avalanche photon detectors, arrays of such detectors, and circuits including such arrays. In some aspects, the detectors and arrays include a virtual beveled edge mesa structure surrounded by resistive material damaged by ion implantation and having side wall profiles that taper inwardly towards the top of the mesa structures, or towards the direction from which the ion implantation occurred. Other aspects are directed to masking and multiple implantation and/or annealing steps. Furthermore, methods for fabricating and using such devices, circuits and arrays are disclosed.

主权项

1. A semiconductor device, comprising:
a substrate layer; a plurality of doped semiconductor layers including a first semiconductor layer doped with a first dopant disposed above said substrate and a second semiconductor layer doped with a second dopant disposed above said first semiconductor layer and proximal thereto; a first depletion region in said first semiconductor layer proximal to said second semiconductor layer; a second depletion region in said second semiconductor layer proximal to said first semiconductor layer; said first and second semiconductor layers being ion implanted in selected regions thereof and having an ion implantation profile in each of said first and second semiconductor layers at a generally positive lateral profile angle with respect to a normal to said first and second semiconductor layers; and said ion implantation profile further defining interior regions of said first and second semiconductor layers that are not ion implanted, and exterior regions of said first and second semiconductor layers that are ion implanted, said interior non-implanted region of the first semiconductor layer having a larger area than said interior non-implanted region of the second semiconductor layer.