Resonant sensing using extensional modes of a plate

摘要

A device or system that incorporates teachings of the present disclosure may include, for example, a resonant structure having a plate, a mass and a set of electrodes. The plate can have an extensional mode at a frequency when excited. The set of electrodes can be used to measure an acceleration of the mass when the acceleration of the mass changes the frequency of the plate. Other embodiments are disclosed.

主权项

1. An apparatus, comprising:
a resonant structure comprising:
a mass;a plate coupled to the mass, wherein the plate has a size, shape and material to support one or more lamb waves of an extensional mode at a frequency when excited; anda plurality of electrodes coupled to the plate for delivering an excitation signal to the plate and for obtaining a measurement signal resulting from an acceleration of the mass which causes a modulation of the frequency of the extensional mode of the plate,wherein the plate includes a piezoelectric layer disposed on a temperature compensated layer,wherein the temperature compensated layer has first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, andwherein the second layer is formed from a different material than the first and third layers.