METHOD FOR PRODUCING HIGH PERFORMING AND ELECTRICALLY STABLE SEMI CONDUCTIVE METAL OXIDE LAYERS LAYERS PRODUCED ACCORDING TO THE METHOD AND USE THEREOF

摘要

The present invention relates to a method for producing a semi conductor laminate comprising a first and a second metal oxide layer as well as a dielectric layer wherein the first metal oxide layer is arranged between the second metal oxide layer and the dielectric layer. The first and second metal oxide layers are formed accordingly from a first and a second liquid phase. The present invention also relates to a semi conductor laminate that can be obtained from such a method and to electronic components comprising such a semi conductor laminate.