发明名称 |
METHODS OF FORMING A MAGNETIC RANDOM ACCESS MEMORY ETCH SPACER AND STRUCTURES FORMED THEREBY |
摘要 |
<p>Methods of forming a memory device structure are described. Those methods may include forming a non-conductive spacer material on a top electrode of a magnetic tunnel junction structure, and then forming a highly selective material on the non-conductive spacer material of the magnetic tunnel junction prior to etching a bottom electrode of the magnetic tunnel junction.</p> |
申请公布号 |
WO2015099899(A1) |
申请公布日期 |
2015.07.02 |
申请号 |
WO2014US65984 |
申请日期 |
2014.11.17 |
申请人 |
INTEL CORPORATION |
发明人 |
LAMBORN, DANIEL R.;GOLONZKA, OLEG;WIEGAND, CHRISTOPHER |
分类号 |
H01L43/10;H01L43/12 |
主分类号 |
H01L43/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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