发明名称 METHODS OF FORMING A MAGNETIC RANDOM ACCESS MEMORY ETCH SPACER AND STRUCTURES FORMED THEREBY
摘要 <p>Methods of forming a memory device structure are described. Those methods may include forming a non-conductive spacer material on a top electrode of a magnetic tunnel junction structure, and then forming a highly selective material on the non-conductive spacer material of the magnetic tunnel junction prior to etching a bottom electrode of the magnetic tunnel junction.</p>
申请公布号 WO2015099899(A1) 申请公布日期 2015.07.02
申请号 WO2014US65984 申请日期 2014.11.17
申请人 INTEL CORPORATION 发明人 LAMBORN, DANIEL R.;GOLONZKA, OLEG;WIEGAND, CHRISTOPHER
分类号 H01L43/10;H01L43/12 主分类号 H01L43/10
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