METHOD FOR MANUFACTURING CONDUCTIVE PATTERN AND DEVICE HAVING CONDUCTIVE PATTERN

摘要

A conductive pattern forming method includes forming a conductive layer on a substrate. An organic pattern including a plurality of fillers condensed in a network shape is formed on the conductive layer. A conductive pattern to which the shapes of the plurality of fillers condensed in the network shape are transferred is formed by dry-etching the conductive layer using the organic pattern as a mask. The organic pattern is eliminated.

主权项

1. A method for forming a conductive pattern, comprising:
forming a conductive layer on a substrate; forming an organic pattern on the conductive layer, the organic pattern including a plurality of fillers condensed in a network shape, wherein the fillers are discrete particles or discrete wires; forming a conductive pattern by dry-etching the conductive layer using the organic pattern as a mask such that the formed conductive pattern has a shape of the fillers arranged in the network; and removing the organic pattern.