MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS

摘要

This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.

主权项

1. A proof-mass structure for an accelerometer, the proof mass structure configured to couple to an adjacent layer using a single anchor, the proof mass structure comprising:
a first z-axis portion configured to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis; a second z-axis portion configured to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane; wherein the first z-axis portion is configured to rotate independent of the second z-axis portion; and a central portion coupled to the first z-axis portion and the second z-axis portion via the first hinge and the second hinge, respectively, the central portion configured to couple with the single anchor and to suspend the first z-axis portion and the second z-axis portion from adjacent layers of the accelerometer.