SUBSTRATE PROCESSING SYSTEM, SUBSTRATE TRANSPORT METHOD, AND COMPUTER STORAGE MEDIUM

摘要

A substrate processing system has: a processing station having a plurality of processing devices; an interface station that transfers substrates between the processing station and a light exposure device provided with a plurality of light exposure stages outside of the system; a plurality of substrate inspection devices; a substrate transport mechanism that transports substrates between processing devices within the processing station and the substrate inspection devices; and a control device that controls the substrate transport mechanism so as to specify the light exposure stage used during exposure processing for a substrate out of the plurality of light exposure stages and carry out transport to a substrate inspection device associated in advance with the specified light exposure stage.