STRUCTURE FOR HOLDING CARBON ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a structure for holding a carbon electrode that stably generates ark discharge and inhibits a carbon electrode from cracking in plasma processing.SOLUTION: A structure 3 for holding a carbon electrode to hold a carbon electrode used in plasma processing includes a columnar first carbon electrode 31, a ring-shaped second carbon electrode 32 arranged so as to enclose the side face of the first carbon electrode 31, an electrode holder 33 made of copper to hold the first carbon electrode, and a cooling unit 35 to cool the first carbon electrode via the electrode holder 33. The second carbon electrode 32 extends from the first carbon electrode 31 while contacting the side face of the electrode holder 33. The second carbon electrode 32 is fixed to the electrode holder 33 by a fixing member 37.