发明名称 |
METHOD FOR RAPID LASER DRILLING OF HOLES IN GLASS AND PRODUCTS MADE THEREFROM |
摘要 |
Forming holes in a material (1) includes focusing a pulsed laser beam (2) into a laser beam focal line (2b) oriented along the beam propagation direction and directed into the material, the laser beam focal line (2b) generating an induced absorption within the material (1), the induced absorption producing a defect line along the laser beam focal line (2b) within the material (1), and translating the material (1) and the laser beam (2) relative to each other, thereby forming a plurality of defect lines in the material, and etching the material in an acid solution to produce holes greater than 1 micron in diameter by enlarging the defect lines in the material. A glass article includes a stack of glass substrates with formed holes of 1-100 micron diameter extending through the stack. |
申请公布号 |
WO2015100056(A1) |
申请公布日期 |
2015.07.02 |
申请号 |
WO2014US70459 |
申请日期 |
2014.12.16 |
申请人 |
CORNING INCORPORATED |
发明人 |
MARJANOVIC, SASHA;PIECH, GARRETT ANDREW;PONS SIEPERMANN, CARLOS A;SHANMUGAM, SHYAMALA;TSUDA, SERGIO;VARGA, ZSIGMOND;WAGNER, ROBERT STEPHEN |
分类号 |
B23K26/00;B23K26/06;B23K26/38;C03B33/02;C03B33/09;C03C15/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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