| 摘要 |
Provided is a frequency adjustment method wherein a residue does not tend to occur, frequency can be adjusted with high accuracy, and a strength decrease is small. This frequency adjustment method for a piezoelectric vibrator (1) is provided with: a step for preparing the piezoelectric vibrator (1) provided with a base part (2), a vibrating arm part (3) that comprises a connecting part (3a) continuous with the base part (2), and a plurality of vibrating arm bodies (3b) extending from the connecting part (3a), and is formed from a single crystal, a lower electrode (5) that is formed on the vibrating arm part (3), a piezoelectric thin film (6) that is formed on the lower electrode (5), and an upper electrode (7) that is formed on the piezoelectric thin film (6); and a step for forming an altered part (8) by irradiating the connecting part (3a) with laser light (B). |
