MULTILEVEL VIA PLACEMENT WITH IMPROVED YIELD IN DUAL DAMASCENE INTERCONNECTION

摘要

A method of operating a computer system to improve via electromigration in an integrated circuit with multilevel interconnect. A method of operating a computer system to improve via electromigration in an integrated circuit with multilevel interconnect using via priority groups.

主权项

1. A method of operating a computer system to improve interconnect reliability in an integrated circuit comprising the steps of:
retrieving via layout data associated with a top via layer and a bottom via layer of the integrated circuit wherein the top and the bottom vias are coupled to an intermediate interconnect level; and performing a first modification of via layout data of at least one of the top via layer and the bottom via layer to form an R-stack; and storing the first modification of the via layout data in the computer.