| 主权项 |
1. A bonding method of bonding a first substrate member to a second substrate member, the method comprising ultrasonically welding a protruding portion extending on a surface of the first substrate member to a surface of the second substrate member by applying ultrasonic vibration to the first substrate member in a state where a top portion of the protruding portion is pressed against the surface of the second substrate member,
wherein a protruding stopper portion for stopping welding is provided on the surface of the first substrate member formed with the protruding portion, or on the surface of the second substrate member to come in contact with the protruding portion in the pressed state, to be disposed around the protruding portion in the pressed state, and the ultrasonically welding includes a first process for applying ultrasonic vibration at amplitude as a first value to the first substrate member, and a second process for applying ultrasonic vibration to the first substrate member at amplitude as a second value lower than the first value after the first process. |
