发明名称 APPARATUS AND METHOD FOR FINE-TUNING MAGNET ARRAYS WITH LOCALIZED ENERGY DELIVERY
摘要 <p>One embodiment relates to an apparatus for adjustment of local magnetic strength in a magnetic device. A stage holds the magnetic device, and a sensor measures a magnetic field at locations above the magnetic device so as to generate magnetic field data. A computer system detects a non-uniformity in the magnetic field from the magnetic field data and determines a location and a duration for application of a pulsed laser beam to correct the non-uniformity. A laser device applies the pulsed laser beam at said location for said duration. Another embodiment relates to a method of adjusting local magnetic strength in a magnetic device. Another embodiment relates to a system for fine-tuning a magnet array with localized energy delivery. Other embodiments, aspects and features are also disclosed.</p>
申请公布号 WO2015100076(A1) 申请公布日期 2015.07.02
申请号 WO2014US70672 申请日期 2014.12.16
申请人 KLA-TENCOR CORPORATION 发明人 GERLING, JOHN
分类号 H01F41/02;H01F7/02 主分类号 H01F41/02
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