| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic substrate in which position data by image processing of an alignment mark formed on the surface of the substrate can be recognized without being hindered by glass coming up to the surface in the manufacturing process thereof. <P>SOLUTION: A method of manufacturing a ceramic substrate 1 includes a surface reforming process for reforming the surface of the alignment mark 8 and the surface of a ceramic part, such as reducing glass coming up to these surfaces for instance, by injecting slurry made of a polishing material such as water (liquid) and alumina particles together with high pressure air to the alignment mark 8 and the ceramic part s around the mark 8, in the ceramic substrate 1 made of ceramic containing glass while having a surface 2 and a back and the alignment mark 8 formed on at least one of the surface 2 and the back. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
