| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a circularity measuring apparatus and a misalignment quantity correction method of the circularity measuring apparatus that accurately calculate the diameter value of a measurement object having a different diameter value from a reference measurement object by calculating and compensating the misalignment quantity. <P>SOLUTION: A circularity measuring apparatus measures the circularity of a measurement object by aligning the center of the measurement object and the center of rotation and by rotating the measurement object relatively to a detection device. The circularity measuring apparatus comprises: means for measuring each of a plurality of reference measurement objects 26-1, 26-2 having a different diameter value and detecting the difference between the above measurements; means for calculating a misalignment quantity Y, which is a misalignment quantity between the generatrix of the reference measurement objects 26-1, 26-2 and a detection point where the detection device detects the measurement object, based on the difference between the measurements; and means for correcting the measurement value of an arbitrary measurement object based on the calculated misalignment quantity Y. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
