电容式微机械感测器结构以及微机械加速度计;CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER

摘要

本发明关于一种电容式微机械感测器结构，其包括：一被牢固地固定至一基板(2)的定子结构(1)以及一藉由弹簧结构(4；4a、4b)的方式而可移动地被固定至该基板(2)的转子结构(3)。该定子结构(1)有复数个定子指状部支撑梁(5)且该转子结构(3)有复数个转子指状部支撑梁(7)。沿着该定子结构(1)之定子指状部支撑梁(5)的定子指状部(10)延伸至沿着该转子指状部结构(12)的转子指状部支撑梁(7)的转子间隙(14)之中，以及沿着该转子指状部结构(12)的转子指状部支撑梁(7)的转子指状部(13)延伸至沿着该定子结构(1)的定子指状部支撑梁(5)的定子间隙(11)之中。; 4a, 4b) to the substrate (2). The stator structure (1) has a plurality of stator finger support beams (5) and the rotor structure (3) has a plurality of rotor finger support beams (7). Stator fingers (10) along the stator finger support beam (5) of the stator structure (9) extend into rotor gaps (14) along the rotor finger support beam (7) of the rotor structure (12), and rotor fingers (13) along the rotor finger support beam (7) of the rotor structure (12) extend into stator gaps (11) along the stator finger support beam (5) of the stator structure (9).