| 摘要 |
<p>The present invention relates to an infrared thermal sensor (10) for detecting infrared rays. The infrared thermal sensor comprises: a substrate (1) and a cap structure (2) to form a sealed cavity (3) together (the cavity includes a gas composition at preset pressure); a membrane (4) arranged inside the cavity (3) to receive an infrared ray (IR) through a window or an aperture (22); a plurality of beams (5) to hang the membrane (4); and a plurality of thermocouples (6) arranged on a plurality of beams (5) to measure the temperature difference (ΔT) between the substrate (1) and the membrane (4) by an incident infrared ray. The rate of thermal resistance (RT1) between the substrate (1) and the membrane (4) through the thermocouple (6), and thermal resistance (RT2) between the substrate (1) and the membrane (4) through a beam and gas composition is a value in the range of 0.8-1.2. Disclosed are a method for designing the sensor (10) and a method for generating the sensor.</p> |
