| 摘要 |
We describe a temperature-compensated resonant MEMS device, comprising: a first oscillator circuit comprising a first resonant MEMS device and providing a first oscillator output; a second oscillator circuit comprising a second resonant MEMS device and providing a second oscillator output; wherein one of said first and second resonant MEMS devices is a temperature reference for the other of said first and second resonant MEMS devices; a level-sensitive mixer circuit having first and second inputs respectively coupled to said first and second oscillator outputs and having a mixer output to provide a signal responsive to a level of said first and second oscillator outputs, said mixer output comprising sum and difference frequency components of said first and second oscillator outputs; a low-pass filter coupled to said mixer output to attenuate said sum frequency component of said mixer output; and an output coupled to an output of said low-pass filter to provide a signal responsive to said difference frequency component. |
