发明名称 在基于光二极体之电子侦测器中用于降低暗电流漂移之系统及方法;SYSTEM AND METHOD FOR REDUCING DARK CURRENT DRIFT IN A PHOTODIODE BASED ELECTRON DETECTOR
摘要 一种感测元件,该感测元件可包括:(a)PIN二极体,该PIN二极体可包括耦接至阳极触点之阳极;耦接至阴极触点之阴极;具有感测区域之半导体部分;以及安置于阴极触点与阳极触点之间的绝缘体;以及(b)屏蔽元件。绝缘体、阴极触点及阳极触点经安置于屏蔽元件与半导体部分之间。屏蔽元件经成形且安置以促进辐射冲击至半导体部分之感测区域上,同时至少部分地将绝缘体屏蔽于从感测区域发射之电子。; a cathode that is coupled to a cathode contact; a semiconductor portion that has a sensing region; and an insulator that is positioned between the cathode contact and the anode contact; and (b) a shielding element. The insulator, the cathode contact and the anode contact are positioned between the shielding element and the semiconductor portion. The shielding element is shaped and positioned to facilitate radiation to impinge onto the sensing region of the semiconductor portion while at least partially shielding the insulator from electrons that are emitted from the sensing region.
申请公布号 TW201526254 申请公布日期 2015.07.01
申请号 TW103140871 申请日期 2014.11.25
申请人 应用材料以色列公司 APPLIED MATERIALS ISRAEL, LTD. 发明人 玛古李斯派渥 MARGULIS, PAVEL
分类号 H01L31/02(2006.01);H01L31/105(2006.01) 主分类号 H01L31/02(2006.01)
代理机构 代理人 蔡坤财李世章
主权项
地址 以色列 IL