发明名称 |
COMPOSITION FOR FORMING ANTISTATIC FILM AND OLIGOMER COMPOUND |
摘要 |
There is provided a composition for forming an antistatic film that has a superior coating performance on the surface of a resist film and forms antistatic film capable of protecting a resist film from being charged. A composition for forming an antistatic film, comprising: an oligomer compound of Formula (1A):
(where R 1 is a hydrogen atom or a group of Formula (2), each of R 2 and R 3 is independently a hydrogen atom, a group of Formula (3), or a group of Formula (4), at least one of the plurality of Rs is a sulfo group, a and b are positive integers satisfying 2 ‰¤ (a + b) ‰¤ 6; and each of a plurality of xs is independently an integer from 0 to 4):
(where n is an integer satisfying 1 ‰¤ n < (a + b + 4); a, b, a plurality of Rs, and x are the same as those in Formula (1A); and each of a plurality of ys is independently an integer from 0 to 5); and water. |
申请公布号 |
EP2789668(A4) |
申请公布日期 |
2015.07.01 |
申请号 |
EP20120854706 |
申请日期 |
2012.11.12 |
申请人 |
NISSAN CHEMICAL INDUSTRIES, LTD. |
发明人 |
NISHITA, TOKIO;MIZUOCHI, RYUTA;SAKAMOTO, RIKIMARU;YAMADA, TOMOHISA;NAKAIE, NAOKI;TAKAYAMA, YUKI |
分类号 |
C09K3/16;C07B61/00;C07C209/10;C07C211/54;C08G73/02;C08L79/02;C09D179/02;G03F7/09;G03F7/11 |
主分类号 |
C09K3/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|