Light source device, light irradiating apparatus equipped with light source device, and method of patterning self-assembled monolayer using light irradiating apparatus

摘要

A light source device is disclosed that can be regarded as a point light source and that emits vacuum ultraviolet light at a sufficiently high optical intensity. The device has a lamp housing to house a flash lamp and a parabolic mirror. Light emitted from the flash lamp is converted to parallel light by the parabolic mirror, and the parallel light exits the lamp housing from a quartz window. The flash lamp has a pair of electrodes, and the distance between the electrodes is 12.5 mm or less. The filler gas pressure is between 2 atm and 8 atm. A current is fed to the flash lamp from an electricity feeding unit. This current requires 8 μs or less from the start of discharge until the current value reaches the peak value. The peak current value is 1500 A or more. The flash lamp emits light including vacuum ultraviolet light.

主权项

1. A light source device configured to emit light including vacuum ultraviolet light comprising:
a flash lamp including an arc tube made from a vacuum ultraviolet light permeable material, and a pair of electrodes disposed in the arc tube and facing each other, a distance between the pair of electrodes being equal to or smaller than 12.5 mm, with a filler gas containing xenon gas being enclosed in the arc tube and a pressure of the filler gas being between 2 atm and 8 atm; and an electricity feeding unit configured to feed the flash lamp with electricity, time for a current fed from the electricity feeding unit to the flash lamp during emission of the flash lamp to reach a peak value from start of discharge being equal to or less than 8 μs, and the peak value of the current being equal to or greater than 1500 A.