| 摘要 |
<p>The invention provides an aligning method of mask and workpiece, with which the position of images formed on the workpiece through projection exposure, the position of images formed through former exposure processing, and the position of mask images for screen printing in the next processing will not have large deviation. At the time of aligning a projection exposure device, zoom ratio for enlarging or reducing projection of the mask (M) images can be adjusted. Accordingly, the sum of deviation value (dR) of the mask mark (MAM1-4) and work mark (WAM1-4) and the deviation value (dM) of the position of mask mark (MAM1-4) and the reference position of the mask mark (SAM1-4) of screened mask used in the next processing can be the minimum, and the aligning of the mask (M) and the workpiece (W) can be achieved by moving the mask (M) or the workpiece (W).</p> |
