Printed chemical mechanical polishing pad

摘要

A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material.

主权项

1. A method of fabricating a polishing layer of a polishing pad, comprising:
successively depositing a plurality of layers with a 3D printer, each layer of the plurality of layers deposited by
spreading a layer of powder across an underlying layer of the plurality of layers, the layer of powder including a powdered material and abrasive particles,ejecting droplets of a binder material from a nozzle onto the layer of powder, the powdered material and binder material providing a pad material precursor, andsolidifying the pad material precursor to form a solidified pad material having a matrix of bonded material formed from the powdered material and the binder material, and the abrasive particles held in the matrix.