Nanogap sensor and method of manufacturing the same

摘要

A nanogap sensor includes a first layer in which a micropore is formed; a graphene sheet disposed on the first layer and including a nanoelectrode region in which a nanogap is formed, the nanogap aligned with the micropore; a first electrode formed on the grapheme sheet; and a second electrode formed on the graphene sheet, wherein the first electrode and the second electrode are connected to respective ends of the nanoelectrode region.

主权项

1. A nanogap sensor comprising:
a micropore layer comprising a micropore; a graphene sheet disposed on the micropore layer and comprising a nanoelectrode region, wherein the nanoelectrode region comprises a nanogap aligned with the micropore; a first electrode disposed on the graphene sheet; and a second electrode disposed on the graphene sheet, wherein the first electrode and the second electrode are connected to the nanoelectrode region at opposite ends of the nanoelectrode region relative to the nanogap, wherein a region of the graphene sheet other than the nanoelectrode region is an electrically inactive region.