发明名称 SPUTTER APPARATUS AND FILM USING THE APPARATUS
摘要 <p>The present invention relates to a sputtering apparatus for manufacturing a film to produce a gradation film through a gradation effect wherein a color or a density gradually changes on the outer surface of a film, the subject to be sputtered thereby easily producing a gradation film. The sputtering apparatus comprises: a target and a sputter gun which are disposed between an unwinding roller and a winding roller in a chamber to execute sputtering on a PET sheet to be sputtered which passes in a horizontal state; and a mask member which is arranged between the PET sheet to be sputtered and the target to adjust a sputtering area of the PET sheet to be sputtered, Wherein the mask member is composed of a masking area which blocks the movement of thin film substances discharged from the target and a sputtering area which permits the movement of thin film substances discharged from the target, thereby consequently forming a sputtering section along the PET sheet wherein a sputtering is performed due to thin film substances which penetrated the sputtering area on the PET sheet to be sputtered.</p>
申请公布号 KR20150071256(A) 申请公布日期 2015.06.26
申请号 KR20130158057 申请日期 2013.12.18
申请人 NEXFIL CO., LTD. 发明人 LEE, SHIN SOON;NOH, SUNG WOO;YANG, SEUNG HAK
分类号 C23C14/34;C23C14/04 主分类号 C23C14/34
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