A COMPACT THERMAL REACTOR FOR RAPID GROWTH OF HIGH QUALITY CARBON NANOTUBES (CNTS) PRODUCED BY CHEMICAL PROCESS WITH LOW POWER CONSUMPTION

摘要

The invention relates to a compact thermal reactor for rapid growth of high quality carbon nanotubes (CNT2) produced by chemical process with low power consumption comprising: a processing chamber having a vacuum vessel, the vacuum vessel having a side cover formed of a first side wall and a second side wall, a top cover, a bottom cover connected to a support stand; feed through housing provided with a substrate; a heating system consisting of a heating element and back means; and at least one each inlet and outlet for gas injection into the process chamber for growing high quality carbon nanotubes over the substrate.