发明名称 |
ADAPTER FOR REPLACEABLE LAMP |
摘要 |
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter. |
申请公布号 |
US2015179425(A1) |
申请公布日期 |
2015.06.25 |
申请号 |
US201414546103 |
申请日期 |
2014.11.18 |
申请人 |
Applied Materials, Inc. |
发明人 |
RANISH Joseph M.;SEREBRYANOV Oleg V. |
分类号 |
H01K1/46;H01K1/66;H05B3/00;H01K1/36 |
主分类号 |
H01K1/46 |
代理机构 |
|
代理人 |
|
主权项 |
1. A lamp assembly, comprising:
a lamp element comprising:
a capsule having a filament disposed therein; anda press seal extending from the capsule; and an adapter removably engaged with at least a portion of the press seal. |
地址 |
Santa Clara CA US |