发明名称 ADAPTER FOR REPLACEABLE LAMP
摘要 Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
申请公布号 US2015179425(A1) 申请公布日期 2015.06.25
申请号 US201414546103 申请日期 2014.11.18
申请人 Applied Materials, Inc. 发明人 RANISH Joseph M.;SEREBRYANOV Oleg V.
分类号 H01K1/46;H01K1/66;H05B3/00;H01K1/36 主分类号 H01K1/46
代理机构 代理人
主权项 1. A lamp assembly, comprising: a lamp element comprising: a capsule having a filament disposed therein; anda press seal extending from the capsule; and an adapter removably engaged with at least a portion of the press seal.
地址 Santa Clara CA US