| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an actuator substrate capable of manufacturing a reliable actuator substrate, preventing peeling and rising of a base material electrode of a connection hole bottom part that have occurred at the time of resist removable during a connection hole formation step. ! SOLUTION: An actuator substrate is manufactured which includes a piezoelectric body that is sandwiched between an upper electrode and a lower electrode 10, and a wiring connected to the upper electrode through a connection hole 30. In a method of forming the connection hole 30 by removing a resist pattern 46, an insulation film 47 that prevents exposure of the upper electrode is temporarily left out. ! COPYRIGHT: (C)2015,JPO&INPIT |
