发明名称 MEMORY STRUCUTRE WITH SELF-ALIGNED FLOATING AND CONTROL GATES AND ASSOCIATED METHODS
摘要 A memory structure having at least substantially aligned floating and control gates. Such a memory structure can include a control gate material disposed between a first insulator layer and a second insulator layer, a floating gate material disposed between the first insulator layer and the second insulator layer and at least substantially aligned with the control gate material, the floating gate material including a metal region, and an interpoly dielectric (IPD) layer disposed between the control gate material and the floating gate material such that the IPD layer electrically isolates the control gate material from the floating gate material.
申请公布号 US2015179790(A1) 申请公布日期 2015.06.25
申请号 US201314140215 申请日期 2013.12.24
申请人 Hopkins John;Simsek-Ege Fatma A. 发明人 Hopkins John;Simsek-Ege Fatma A.
分类号 H01L29/788;H01L29/66;H01L29/49 主分类号 H01L29/788
代理机构 代理人
主权项 1. A memory structure having at least substantially aligned floating and control gates, comprising: a control gate material disposed between a first insulator layer and a second insulator layer; a floating gate material disposed between the first insulator layer and the second insulator layer and at least substantially aligned with the control gate material, the floating gate material including a metal region; an interpoly dielectric (IPD) layer disposed between the control gate material and the floating gate material such that the IPD layer electrically isolates the control gate material from the floating gate material.
地址 Boise ID US