INFRARED THERMAL SENSOR WITH BEAMS HAVING DIFFERENT WIDTHS

摘要

An infrared thermal sensor for detecting infrared radiation is described. It comprises a substrate and a cap structure together forming a sealed cavity. A membrane is suspended therein by a plurality of beams, each beam comprising at least one thermocouple arranged therein or thereon for measuring a temperature difference between the membrane and the substrate. At least two beams have a different length and each of the thermocouples have a substantially same constant width to length ratio such that the thermal resistance measured between the membrane and the substrate is substantially constant for each beam, and such that the electrical resistance measured between the membrane and the substrate is substantially constant for each beam. The beams may be linear, and be oriented in a non-radial direction.

主权项

1. An infrared thermal sensor for detecting infrared radiation, the infrared thermal sensor comprising:
a substrate and a cap structure together forming a sealed cavity; a membrane arranged in said cavity for receiving infrared radiation through a window or aperture; a plurality of beams for suspending the membrane, each beam of the plurality of beams comprising at least one thermocouple arranged therein or thereon for measuring a temperature difference between the membrane and the substrate due to the infrared radiation; wherein: the plurality of beams comprises at least two beams having a different length; and wherein each of the thermocouples in or on the plurality of beams have a substantially same constant width to length ratio; and wherein each of the beams form a straight connection between a first anchor point on a side of the cavity and a second anchor point on the membrane; and wherein the beams are oriented in a direction offset from a radial direction with respect to a center of the membrane.