| 发明名称 |
PHOTODETECTORS BASED ON WURTZITE MgZnO |
| 摘要 |
A photodetector (PD) includes a substrate, and a ZnO nucleation layer on the substrate. A wurtzite MgxZn1-xO layer is on the ZnO nucleation layer, wherein x is a mole fraction between 0 and 0.62. A level of crystallinity of the wurtzite MgxZn1-xO layer characterized by x-ray diffraction with a deconvolution of a triple-crystal ω rocking curve of a ZnO (0002) peak has a narrow component with a full width at half maximum (FWHM) less than or equal to (≦) 20 arc/s. First and second spaced apart electrodes are on a surface of the wurtzite MgxZn1-xO layer. The mole fraction x can be between 0.20 and 0.46, including between 0.37 and 0.46, and provide a PD responsivity of at least 20 A/W at 5V in the solar blind region from 200 nm to 290 nm. |
| 申请公布号 |
US2015179832(A1) |
申请公布日期 |
2015.06.25 |
| 申请号 |
US201414291793 |
申请日期 |
2014.05.30 |
| 申请人 |
University of Central Florida Research Foundation, Inc. |
发明人 |
WEI MING;BOUTWELL R. CASEY;SCHOENFELD WINSTON V. |
| 分类号 |
H01L31/0296;H01L31/0368;H01L31/18 |
主分类号 |
H01L31/0296 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A photodetector (PD), comprising:
a substrate; a ZnO nucleation layer on said substrate; a wurtzite MgxZn1-xO layer epitaxial to and on said ZnO nucleation layer, wherein x is a mole fraction between 0 and 0.62, wherein a level of crystallinity of said wurtzite MgxZn1-xO layer characterized by x-ray diffraction with a deconvolution of a triple-crystal ω rocking curve of a ZnO (0002) peak has a narrow component with a full width at half maximum (FWHM) less than or equal to (≦) 20 arc/s, and first and second spaced apart electrodes on said wurtzite MgxZn1-xO layer. |
| 地址 |
Orlando FL US |
