Waveguide-integrated graphene photodetectors

摘要

A photodetector (100) includes a waveguide (120) on a substrate, and a photodetection portion (130) connected to the waveguide. The photodetection portion includes a first insulation layer (132), a graphene layer (133) on said first layer (132), and a second insulation layer (134) on the graphene. A first electrode (141) and a second electrode (142) separated from the first ridge portion (131) and electrically connected to the graphene.