| 摘要 |
<p>A measurable height is simply expanded while a measurement range is maintained, In a three-dimensional shape measuring apparatus that measures a three-dimensional shape of a measurement target by analyzing an optical pattern projected to the measurement target, luminance of the optical pattern periodically changing according to a position, the measurement target is attached to a mounting stage having a reference plane of a height of the measurement target, a measurement head projects the optical pattern to the measurement target and the reference plane to capture images of the projected optical patterns, and a displacement portion displaces the measurement head in a height direction. A phase computing portion (75) computes a phase of the optical pattern in a certain pixel included in the captured image, a height computing portion (77) computes a height of the measurement target based on the computed phase, and a feed amount computing portion (78) computes a displacement amount, in which the displacement portion should be displaced, based on the computed height. The height computing portion (77) computes the height based on the phase computed by the phase computing portion (75) and corrects the computed height based on the displacement amount, thereby computing the height of the measurement target.</p> |
