发明名称 電子デバイスの生産管理装置、生産管理システム及び生産管理プログラム
摘要 A manufacturing control apparatus of an electronic device is configured to implement processing to generate a first model function relating to a relationship between a characteristic of a component included in the electronic device. The apparatus is configured to implement processing to determine a first manufacturing condition value to obtain the characteristic of the component based on the first model function. The apparatus is configured to implement processing to calculate a squared prediction error of a measured value of the characteristic of the component. The apparatus is configured to implement processing to determine a second manufacturing condition value of the next electronic device according to the calculated squared prediction error.
申请公布号 JP5739841(B2) 申请公布日期 2015.06.24
申请号 JP20120134282 申请日期 2012.06.13
申请人 株式会社東芝 发明人 黄 琳ティン
分类号 H01L21/31;G05B19/418;H01L21/02 主分类号 H01L21/31
代理机构 代理人
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