发明名称 FLOW CONTROL VALVE AND FLOW CONTROL SYSTEM USING SAME
摘要 <p>The present invention provides a flow control valve and a flow control system, which maintain a predetermined flow of fluid with greater cleanliness and allow the setting of a fluid flow area to be changed. The flow control valve (101) comprises: an inflow block (10) including a main body inflow part (11), an inflow chamber (13), and a middle discharging part (12); a discharging block (30) including a middle inflow part (31), a discharging chamber (33), a valve seat (37), and a main body discharging part (32); a connecting block (50) connecting the inflow block with the discharging block; a connecting fluid channel (70) connecting the middle discharging part with the middle inflow part; a differential pressure part (75); a first diaphragm (20), to which a predetermined pressure is normally applied; and a second diaphragm (40) including a valve body (47) performing an advancing and retreating movement respective to the valve seat. The connecting block receives a transferring member (55), which has a connection chamber and transfers the change of each diaphragm to another source and allows the valve body to perform an advancing and retreating movement respective to the valve seat according to the advancing and retreating movement of both diaphragms by the change of the pressure of the differential pressure part, thereby maintaining a uniform flow of fluid, which is controlled.</p>
申请公布号 KR20150069510(A) 申请公布日期 2015.06.23
申请号 KR20140141511 申请日期 2014.10.20
申请人 ADVANCE DENKIKOGYO KABUSHIKI KAISHA 发明人 SASAO KIMIHITO
分类号 H01L21/02 主分类号 H01L21/02
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