Vertical electronic fuse

摘要

An electronic fuse structure including a first Mx metal comprising a conductive cap, an Mx+1 metal located above the Mx metal, wherein the Mx+1 metal does not comprise a conductive cap, and a via, wherein the via electrically connects the Mx metal to the Mx+1 metal in a vertical orientation.

主权项

1. An electronic fuse structure comprising:
an Mx level comprising a first Mx metal and a second Mx metal embedded in an Mx dielectric, a top surface of the first Mx metal and a top surface of the second Mx metal are coplanar; an Mx+1 level immediately above the Mx level, the Mx+1 level comprising an Mx+1 metal embedded in an Mx+1 dielectric; a conductive cap covering an entire top surface of the first Mx metal and separating the top surface of the first Mx metal from a cap dielectric; the cap dielectric positioned between the Mx level and the Mx+1 level in direct contact with the entire top surface of the second Mx metal and covering a portion of a top surface and entire sidewalls of the conductive cap, and the cap dielectric having a substantially uniform thickness on the top surfaces of the first Mx metal and the second Mx metal; and a via electrically connecting the first Mx metal to the Mx+1 metal in a vertical orientation, the conductive cap separates the first Mx metal from the via.