Miniature MEMS actuator assemblies

摘要

In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.

主权项

1. An actuator assembly, comprising:
a planar mounting platform that defines a first plane; a plurality of planar actuators, each actuator including at least one elongated output shaft having an output end coupled to an output coupler that is coupled to the mounting platform; wherein each actuator defines an additional plane that is formed at a common non-zero angle with respect to the first plane; and wherein the common angle is less than ninety degrees.