| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem of a cleaning method by baking that it takes time for the heating step and the natural cooling step following thereto, and to provide a cleaning apparatus of high cleaning efficiency.SOLUTION: A valve 3 is arranged between a mass spectroscope and a cleaning gas introducing section and cleaning gas is introduced, in pulse, to the mass spectroscope by opening and closing the valve. The conductance between the cleaning gas introducing section and mass spectroscope is sufficiently large, and the pressure in the mass spectroscope increases significantly when the valve is in an open state. In other words, a large quantity of cleaning gas is introduced into the mass spectroscope. Pollutants adhering to the inner wall of the mass spectroscope are removed by introducing a large quantity of cleaning gas into the mass spectroscope. |
