| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic device manufacturing apparatus having a high mass productivity. ! SOLUTION: An organic device-manufacturing apparatus 10 for manufacturing an organic device by depositing an organic substance on a substrate 20, comprises: a cylindrical member 110 having an opening 112 at a top part thereof and a vapor deposition source 111 containing an organic substance in a lower part thereof, and heated to a temperature higher than a vapor deposition temperature of the organic substance; a conveying rotor 120 arranged at a position not overlapping the opening 112, when viewed from the top, for conveying the substrate 20 over the opening 112; a shielding member 130 interposed between the opening 112 and the conveying rotor 120 for reducing the adhesion of the organic substance to the conveying rotor 120; and an adhesion reducing mechanism for reducing the adhesion of the organic substance to the shielding member 130. ! COPYRIGHT: (C)2015,JPO&INPIT |
