发明名称 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To reduce the manufacturing cost by improving the electric performance, increasing the mutual connection density between a chip and a package, and saving the silicon area, thereby reducing the device cost in a semiconductor structure.SOLUTION: A semiconductor structure includes a device 100, a conductor pad 102 on the device 100, and an AgYalloy support 115 arranged on the conductor pad 102. The Y of the AgYalloy contains a metal forming a complete solid solution with Ag at an arbitrary mass percentage, and the X of the AgYalloy is in a range of about 0.005-0.25. Preferably, the Y contains at least one of Au and Pd. Preferably, the AgYalloy support 115 has a height of about 30-100μm.</p>
申请公布号 JP2015115596(A) 申请公布日期 2015.06.22
申请号 JP20140005799 申请日期 2014.01.16
申请人 CHIPMOS TECHNOLOGIES INC 发明人 CHENG SHIH JYE;LU TUNG BAO
分类号 H01L21/60;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/60
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