发明名称 |
MASK FOR DEPOSITING ORGANIC MATERIAL AND APPRATUS FOR DEPOSITING ORGANIC MATERIAL INCLUDING THE SAME |
摘要 |
<p>The purpose of the present invention is to provide an organic matter deposition mask and an organic matter deposition device having the same preventing a substrate from undergoing organic foreign substances transition. The present invention comprises: a chamber having a processing space; an organic matter deposition mask formed to have a passing unit and supporting the substrate; a mask support unit supporting the organic matter deposition mask; and a deposition module passing through the passing unit to inject the organic matter deposited on the substrate. The passing unit comprises: an inlet of a first size where the organic matter is introduced; and an outlet of a second size wherein the introduced organic matter is discharged to the substrate and being larger than the first size.</p> |
申请公布号 |
KR20150068022(A) |
申请公布日期 |
2015.06.19 |
申请号 |
KR20130153742 |
申请日期 |
2013.12.11 |
申请人 |
LG DISPLAY CO., LTD. |
发明人 |
BAE, SUNG IL;PARK, SEUNG CHUL |
分类号 |
C23C14/04;H01L51/56 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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