发明名称 MASK FOR DEPOSITING ORGANIC MATERIAL AND APPRATUS FOR DEPOSITING ORGANIC MATERIAL INCLUDING THE SAME
摘要 <p>The purpose of the present invention is to provide an organic matter deposition mask and an organic matter deposition device having the same preventing a substrate from undergoing organic foreign substances transition. The present invention comprises: a chamber having a processing space; an organic matter deposition mask formed to have a passing unit and supporting the substrate; a mask support unit supporting the organic matter deposition mask; and a deposition module passing through the passing unit to inject the organic matter deposited on the substrate. The passing unit comprises: an inlet of a first size where the organic matter is introduced; and an outlet of a second size wherein the introduced organic matter is discharged to the substrate and being larger than the first size.</p>
申请公布号 KR20150068022(A) 申请公布日期 2015.06.19
申请号 KR20130153742 申请日期 2013.12.11
申请人 LG DISPLAY CO., LTD. 发明人 BAE, SUNG IL;PARK, SEUNG CHUL
分类号 C23C14/04;H01L51/56 主分类号 C23C14/04
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